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New point for dew point

Peter Huang of the Sensor Science Division’s Temperature and Humidity group has devised a new humidity generator that enables dew-point measurements up to 98

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UV lithography: Taking extreme measures

(PhysOrg.com) -- Sometime soon, microchip fabricators will take the next major step in the relentless reduction of feature size, from the current minimum of 22 nm down to 10 nm and perhaps even smaller. Getting there, however, will entail much more than incremental progress

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